Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
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| Main Authors: | , , , , |
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| Other Authors: | |
| Language: | English |
| Published: |
Elsevier
2018
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| Subjects: | |
| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/5512 |
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| _version_ | 1875043447537139712 |
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| author | del Corro, P.G. Imboden, M. Pérez, D.J. Bishop, D.J. Pastoriza, H. |
| author2 | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas |
| author_browse | Bishop, D.J. Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas Imboden, M. Pastoriza, H. Pérez, D.J. del Corro, P.G. |
| author_facet | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas del Corro, P.G. Imboden, M. Pérez, D.J. Bishop, D.J. Pastoriza, H. |
| author_sort | del Corro, P.G. |
| collection | DSpace |
| description | Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina |
| id | dspace-20.500.12553-5512 |
| institution | Repositorio Institucional NUCLEA |
| language | eng |
| publishDate | 2018 |
| publishDateSort | 2018 |
| publisher | Elsevier |
| publisherStr | Elsevier |
| record_format | dspace |
| spellingShingle | MEMS MICROSCOPIA DE EFECTO TUNEL MICROSCOPIA DE FUERZA ATOMICA Comb drives Nanopositioners Capacitive detection del Corro, P.G. Imboden, M. Pérez, D.J. Bishop, D.J. Pastoriza, H. Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| thumbnail | https://nuclea.cnea.gob.ar/server/api/core/bitstreams/17e4d026-2d0b-45fa-b466-2e19b31f21b9/content |
| title | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_full | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_fullStr | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_full_unstemmed | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_short | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_sort | single ended capacitive self sensing system for comb drives driven xy nanopositioners |
| topic | MEMS MICROSCOPIA DE EFECTO TUNEL MICROSCOPIA DE FUERZA ATOMICA Comb drives Nanopositioners Capacitive detection |
| url | https://nuclea.cnea.gob.ar/handle/20.500.12553/5512 |
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