Single ended capacitive self-sensing system for comb drives driven XY nanopositioners
Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
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| Main Authors: | , , , , |
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| Language: | English |
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Elsevier
2018
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| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/5512 |
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| _version_ | 1866906955062181888 |
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| author | del Corro, P.G. Imboden, M. Pérez, D.J. Bishop, D.J. Pastoriza, H. |
| author2 | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas |
| author_browse | Bishop, D.J. Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas Imboden, M. Pastoriza, H. Pérez, D.J. del Corro, P.G. |
| author_facet | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas del Corro, P.G. Imboden, M. Pérez, D.J. Bishop, D.J. Pastoriza, H. |
| author_sort | del Corro, P.G. |
| collection | DSpace |
| description | Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina |
| id | dspace-20.500.12553-5512 |
| institution | Repositorio Institucional NUCLEA |
| language | eng |
| publishDate | 2018 |
| publishDateSort | 2018 |
| publisher | Elsevier |
| publisherStr | Elsevier |
| record_format | dspace |
| spelling | dspace-20.500.12553-55122024-05-09T05:32:39Z Single ended capacitive self-sensing system for comb drives driven XY nanopositioners del Corro, P.G. Imboden, M. Pérez, D.J. Bishop, D.J. Pastoriza, H. MEMS MICROSCOPIA DE EFECTO TUNEL MICROSCOPIA DE FUERZA ATOMICA Comb drives Nanopositioners Capacitive detection Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina Fil: Pastoriza, H. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina Fil: Imboden, M. École Polytechnique Fédérale de Lausanne. Microsystems for Space Technologies Laboratory; Suiza Fil: Pérez, D.J. Boston University. Division of Material Science; Estados Unidos Fil: Bishop, D.J. Boston University. Division of Material Science; Estados Unidos; Boston University. Department of Electrical and Computer Engineering; Estados Unidos; Boston University. Department of Physics; Estados Unidos Elsevier Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas 2018-03-01 info:eu-repo/semantics/openAccess application/pdf https://nuclea.cnea.gob.ar/handle/20.500.12553/5512 0924-4247 1873-3069 eng v. 271 Sensors and Actuators A: Physical info:eu-repo/semantics/openAccess |
| spellingShingle | MEMS MICROSCOPIA DE EFECTO TUNEL MICROSCOPIA DE FUERZA ATOMICA Comb drives Nanopositioners Capacitive detection del Corro, P.G. Imboden, M. Pérez, D.J. Bishop, D.J. Pastoriza, H. Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_full | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_fullStr | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_full_unstemmed | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_short | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners |
| title_sort | single ended capacitive self sensing system for comb drives driven xy nanopositioners |
| topic | MEMS MICROSCOPIA DE EFECTO TUNEL MICROSCOPIA DE FUERZA ATOMICA Comb drives Nanopositioners Capacitive detection |
| url | https://nuclea.cnea.gob.ar/handle/20.500.12553/5512 |
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