Handbook of silicon wafer cleaning technology.
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| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Norwich, N.Y. :
W. Andrew,
2008.
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| Series: | Materials science and process technology series
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| Subjects: | |
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| LEADER | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 008 | 170703s2008####xxuad||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | |a 9780815515548 | ||
| 041 | 7 | |a en |2 ISO 639-1 | |
| 091 | |a 50898 | ||
| 100 | 1 | |a Reinhardt, Karen A. |e ed. | |
| 245 | 1 | 0 | |a Handbook of silicon wafer cleaning technology. |
| 260 | |a Norwich, N.Y. : |b W. Andrew, |c 2008. | ||
| 300 | |a xxvi, 718 p. : |b il., tabla, diagr. | ||
| 490 | 1 | |a Materials science and process technology series | |
| 500 | |a Bibliografía al final de cada capítulo | ||
| 650 | 4 | |a SEMICONDUCTORES -DISPOSITIVOS -MANUALES | |
| 650 | 4 | |a TECNOLOGIA DE SILICIO -MANUALES | |
| 700 | 1 | |a Kern, Werner |d 1925- |e ed. | |
| 830 | |a Materials science and process technology series | ||
| 999 | |c 25860 |d 25860 | ||