APA (7th ed.) Citation
Reinhardt, K. A., & Kern, W. (2008). Handbook of silicon wafer cleaning technology. W. Andrew.
Chicago Style (17th ed.) Citation
Reinhardt, Karen A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. Norwich, N.Y.: W. Andrew, 2008.
MLA (9th ed.) Citation
Reinhardt, Karen A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. W. Andrew, 2008.
Warning: These citations may not always be 100% accurate.