Handbook of silicon wafer cleaning technology.

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Bibliographic Details
Main Author:	Reinhardt, Karen A. (ed.)
Other Authors:	Kern, Werner 1925- (ed.)
Format:	Book
Language:	English
Published:	Norwich, N.Y. : W. Andrew, 2008.
Series:	Materials science and process technology series
Subjects:	SEMICONDUCTORES -DISPOSITIVOS -MANUALES TECNOLOGIA DE SILICIO -MANUALES
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3rd Floor Main Library

Holdings details from 3rd Floor Main Library
Call Number:	A1234.567
Copy 1	Available