Handbook of silicon wafer cleaning technology.
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Norwich, N.Y. :
W. Andrew,
2008.
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| Series: | Materials science and process technology series
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| Subjects: | |
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| Item Description: | Bibliografía al final de cada capítulo |
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| Physical Description: | xxvi, 718 p. : il., tabla, diagr. |
| ISBN: | 9780815515548 |