Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography
Fil: Perez, Diego Javier. Consejo Nacional de Investigaciones Cientificas y Tecnicas. Oficina de Coordinacion Administrativa Ciudad Universitaria. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia - Nodo Bariloche | Comision Nacion...
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Institute of Electrical and Electronics Engineers
2023
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| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/8553 |
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| author | Perez, Diego Javier Wang, Mingkang Madhaven, Venkatesh Sathisivan, Mogana Tay, Charlie Aksyuk, Vladimir A. |
| author_browse | Aksyuk, Vladimir A. Madhaven, Venkatesh Perez, Diego Javier Sathisivan, Mogana Tay, Charlie Wang, Mingkang |
| author_facet | Perez, Diego Javier Wang, Mingkang Madhaven, Venkatesh Sathisivan, Mogana Tay, Charlie Aksyuk, Vladimir A. |
| author_sort | Perez, Diego Javier |
| collection | DSpace |
| description | Fil: Perez, Diego Javier. Consejo Nacional de Investigaciones Cientificas y Tecnicas. Oficina de Coordinacion Administrativa Ciudad Universitaria. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia - Nodo Bariloche | Comision Nacional de Energia Atomica. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia - Nodo Bariloche.; Argentina. University of Maryland; Estados Unidos |
| id | dspace-20.500.12553-8553 |
| institution | Repositorio Institucional NUCLEA |
| publishDate | 2023 |
| publishDateSort | 2023 |
| publisher | Institute of Electrical and Electronics Engineers |
| publisherStr | Institute of Electrical and Electronics Engineers |
| record_format | dspace |
| spelling | dspace-20.500.12553-85532025-12-11T23:31:55Z Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography Perez, Diego Javier Wang, Mingkang Madhaven, Venkatesh Sathisivan, Mogana Tay, Charlie Aksyuk, Vladimir A. Fil: Perez, Diego Javier. Consejo Nacional de Investigaciones Cientificas y Tecnicas. Oficina de Coordinacion Administrativa Ciudad Universitaria. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia - Nodo Bariloche | Comision Nacional de Energia Atomica. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia. Unidad Ejecutora Instituto de Nanociencia y Nanotecnologia - Nodo Bariloche.; Argentina. University of Maryland; Estados Unidos Fil: Wang, Mingkang. University of Maryland; Estados Unidos Fil: Madhaven, Venkatesh. No especifíca; Fil: Sathisivan, Mogana. No especifíca; Fil: Tay, Charlie. No especifíca; Fil: Aksyuk, Vladimir A.. National Institute Of Standards And Technology; Estados Unidos Institute of Electrical and Electronics Engineers 2023-02 info:eu-repo/semantics/closedAccess https://nuclea.cnea.gob.ar/handle/20.500.12553/8553 1057-7157 |
| spellingShingle | Perez, Diego Javier Wang, Mingkang Madhaven, Venkatesh Sathisivan, Mogana Tay, Charlie Aksyuk, Vladimir A. Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography |
| title | Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography |
| title_full | Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography |
| title_fullStr | Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography |
| title_full_unstemmed | Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography |
| title_short | Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography |
| title_sort | integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep uv photolithography |
| url | https://nuclea.cnea.gob.ar/handle/20.500.12553/8553 |
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