Perez, D. J., Wang, M., Madhaven, V., Sathisivan, M., Tay, C., & Aksyuk, V. A. (2023). Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography. Institute of Electrical and Electronics Engineers.
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Chicago Style (17th ed.) Citation
Perez, Diego Javier, Mingkang Wang, Venkatesh Madhaven, Mogana Sathisivan, Charlie Tay, and Vladimir A. Aksyuk. Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography. Institute of Electrical and Electronics Engineers, 2023.
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MLA (9th ed.) Citation
Perez, Diego Javier, et al. Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography. Institute of Electrical and Electronics Engineers, 2023.
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Warning: These citations may not always be 100% accurate.