Annealing effects on photoresist films' mechanical and chemical resistance
Fil: Avellaneda, Manuel. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; Argentina
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| Main Authors: | , , , |
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| Published: |
Elsevier
2023
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| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/8167 |
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| _version_ | 1875043098865696768 |
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| author | Avellaneda, Manuel Boasso, Andrés Sirena, Martin Roa Díaz, Simón Andre |
| author_browse | Avellaneda, Manuel Boasso, Andrés Roa Díaz, Simón Andre Sirena, Martin |
| author_facet | Avellaneda, Manuel Boasso, Andrés Sirena, Martin Roa Díaz, Simón Andre |
| author_sort | Avellaneda, Manuel |
| collection | DSpace |
| description | Fil: Avellaneda, Manuel. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; Argentina |
| id | dspace-20.500.12553-8167 |
| institution | Repositorio Institucional NUCLEA |
| publishDate | 2023 |
| publishDateSort | 2023 |
| publisher | Elsevier |
| publisherStr | Elsevier |
| record_format | dspace |
| spellingShingle | Avellaneda, Manuel Boasso, Andrés Sirena, Martin Roa Díaz, Simón Andre Annealing effects on photoresist films' mechanical and chemical resistance |
| thumbnail | https://nuclea.cnea.gob.ar/server/api/core/bitstreams/fb8b0caf-9338-4309-87cc-8582494bf052/content |
| title | Annealing effects on photoresist films' mechanical and chemical resistance |
| title_full | Annealing effects on photoresist films' mechanical and chemical resistance |
| title_fullStr | Annealing effects on photoresist films' mechanical and chemical resistance |
| title_full_unstemmed | Annealing effects on photoresist films' mechanical and chemical resistance |
| title_short | Annealing effects on photoresist films' mechanical and chemical resistance |
| title_sort | annealing effects on photoresist films mechanical and chemical resistance |
| url | https://nuclea.cnea.gob.ar/handle/20.500.12553/8167 |
| work_keys_str_mv | AT avellanedamanuel annealingeffectsonphotoresistfilmsmechanicalandchemicalresistance AT boassoandres annealingeffectsonphotoresistfilmsmechanicalandchemicalresistance AT sirenamartin annealingeffectsonphotoresistfilmsmechanicalandchemicalresistance AT roadiazsimonandre annealingeffectsonphotoresistfilmsmechanicalandchemicalresistance |