Annealing effects on photoresist films' mechanical and chemical resistance
Fil: Avellaneda, Manuel. Comisión Nacional de Energía Atómica. Gerencia del Área de Energía Nuclear. Instituto Balseiro; Argentina
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Elsevier
2023
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| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/8167 |
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