Comb Drive Designs With Minimized Levitation
Fil: del Corro, P. G. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
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| Main Authors: | , , , |
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| Language: | English |
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IEEE (Institute of Electrical and Electronics Engineers)
2016
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| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/5511 |
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| author | del Corro, P. G. Imboden, M. Bishop, D. J. Pastoriza, H. |
| author2 | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas |
| author_browse | Bishop, D. J. Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas Imboden, M. Pastoriza, H. del Corro, P. G. |
| author_facet | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas del Corro, P. G. Imboden, M. Bishop, D. J. Pastoriza, H. |
| author_sort | del Corro, P. G. |
| collection | DSpace |
| description | Fil: del Corro, P. G. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina |
| id | dspace-20.500.12553-5511 |
| institution | Repositorio Institucional NUCLEA |
| language | eng |
| publishDate | 2016 |
| publishDateSort | 2016 |
| publisher | IEEE (Institute of Electrical and Electronics Engineers) |
| publisherStr | IEEE (Institute of Electrical and Electronics Engineers) |
| record_format | dspace |
| spelling | dspace-20.500.12553-55112024-05-09T05:33:30Z Comb Drive Designs With Minimized Levitation del Corro, P. G. Imboden, M. Bishop, D. J. Pastoriza, H. MEMS LEVITACION SUBSTRATOS MEMS Comb drives Levitation Actuators Fil: del Corro, P. G. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina Fil: Pastoriza, H. Comisión Nacional de Energía Atómica. Instituto Balseiro. Laboratorio de Bajas Temperaturas; Argentina; Universidad Nacional de Cuyo; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina Fil: Imboden, M. École Polytechnique Fédérale de Lausanne. Microsystems for Space Technologies Laboratory; Suiza Fil: Bishop, D. J. Boston University. Department of Electrical and Computer Engineering; Estados Unidos; Boston University. Department of Physics; Estados Unidos IEEE (Institute of Electrical and Electronics Engineers) Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas 2016-10-01 info:eu-repo/semantics/openAccess application/pdf https://nuclea.cnea.gob.ar/handle/20.500.12553/5511 1057-7157 1941-0158 eng v. 25, n. 6 Journal of Microelectromechanical Systems info:eu-repo/semantics/openAccess |
| spellingShingle | MEMS LEVITACION SUBSTRATOS MEMS Comb drives Levitation Actuators del Corro, P. G. Imboden, M. Bishop, D. J. Pastoriza, H. Comb Drive Designs With Minimized Levitation |
| title | Comb Drive Designs With Minimized Levitation |
| title_full | Comb Drive Designs With Minimized Levitation |
| title_fullStr | Comb Drive Designs With Minimized Levitation |
| title_full_unstemmed | Comb Drive Designs With Minimized Levitation |
| title_short | Comb Drive Designs With Minimized Levitation |
| title_sort | comb drive designs with minimized levitation |
| topic | MEMS LEVITACION SUBSTRATOS MEMS Comb drives Levitation Actuators |
| url | https://nuclea.cnea.gob.ar/handle/20.500.12553/5511 |
| work_keys_str_mv | AT delcorropg combdrivedesignswithminimizedlevitation AT imbodenm combdrivedesignswithminimizedlevitation AT bishopdj combdrivedesignswithminimizedlevitation AT pastorizah combdrivedesignswithminimizedlevitation |