The recrystallization of ion-implanted silicon layers. II: Implant species effect.
Fil: Christodoulides, C. E. Comisión Nacional de Energía Atómica; Argentina
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| Main Authors: | , , , , |
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| Language: | English |
| Published: |
Gordon and Breach Science
1978
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| Subjects: | |
| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/1953 |
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