Ion implantation, sputtering and their applications /
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| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
London ; New York :
Academic Press,
1976.
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| Subjects: | |
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| 003 | AR-SmCIES | ||
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| 008 | 760810s1976 enka rb 001 0 eng d | ||
| 999 | |c 32217 |d 32217 | ||
| 080 | |a 539.188 | ||
| 100 | 1 | |a Townsend, P. D. |q (Peter David) |9 1742 | |
| 245 | 1 | 0 | |a Ion implantation, sputtering and their applications / |c by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. |
| 260 | |a London ; |a New York : |b Academic Press, |c 1976. | ||
| 300 | |a ix, 333 p. : |b il. ; |c 24 cm. | ||
| 504 | |a Bibliografía al final de cada capítulo. | ||
| 650 | 7 | |a ION IMPLANTATION |2 inist |9 1743 | |
| 650 | 7 | |a IMPLANTACION DE IONES |2 inist |9 1744 | |
| 650 | 7 | |a CHISPORROTEO |2 inist |9 1745 | |
| 650 | 7 | |a SPUTTERING |2 inist |9 1746 | |
| 700 | 1 | |a Kelly, J. C. |q (John Clive), |9 1747 | |
| 700 | 1 | |a Hartley, N. E. W., |9 1748 | |
| 942 | |2 udc |c BK | ||
| 952 | |0 0 |1 0 |2 ddc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2019-01-04 |i 24264 |o 539.188 T667 |p 24264 |r 2019-01-04 00:00:00 |w 2019-01-04 |y BK | ||