Ion implantation, sputtering and their applications /
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| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
London ; New York :
Academic Press,
1976.
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| Subjects: | |
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| Physical Description: | ix, 333 p. : il. ; 24 cm. |
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| Bibliography: | Bibliografía al final de cada capítulo. |