APA (7th ed.) Citation
Townsend, P. D., Kelly, J. C., & Hartley, N. E. W. (1976). Ion implantation, sputtering and their applications. Academic Press.
Chicago Style (17th ed.) Citation
Townsend, P. D., J. C. Kelly, and N. E. W. Hartley. Ion Implantation, Sputtering and Their Applications. London ; New York: Academic Press, 1976.
MLA (9th ed.) Citation
Townsend, P. D., et al. Ion Implantation, Sputtering and Their Applications. Academic Press, 1976.
Warning: These citations may not always be 100% accurate.