Fundamentals of microfabrication : the science of miniaturization.
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla. :
CRC press,
2002.
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| Subjects: | |
| Online Access: | View in OPAC |
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Internet
View in OPACCentro de Información Eduardo Savino
| Call Number: |
621.382.2 M266 2.ed. |
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| Copy | Missing |