APA (7th ed.) Citation
Madou, M. J. (2002). Fundamentals of microfabrication: The science of miniaturization. CRC press.
Chicago Style (17th ed.) Citation
Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton, Fla.: CRC press, 2002.
MLA (9th ed.) Citation
Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. CRC press, 2002.
Warning: These citations may not always be 100% accurate.