Fundamentals of microfabrication : the science of miniaturization.
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla. :
CRC press,
2002.
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| Subjects: | |
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| Item Description: | Apéndices: p.669-702 Ejercicios y bibliografía al final de cada capítulo |
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| Physical Description: | 723 p. : il., tabla, diagr. |
| ISBN: | 0849308267 |
| Related Items: | Ed. anterior: Fundamentals of microfabrication and nanotechnology. 3.ed.. Inventario: 50895 |