Fundamentals of microfabrication : the science of miniaturization.
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla. :
CRC press,
2002.
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| Subjects: | |
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MARC
| LEADER | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 008 | 170703s2002####xxuad||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | |a 0849308267 | ||
| 041 | 7 | |a en |2 ISO 639-1 | |
| 091 | |a 50590 | ||
| 100 | 1 | |a Madou, Marc J. | |
| 245 | 1 | 0 | |a Fundamentals of microfabrication : the science of miniaturization. |
| 260 | |a Boca Raton, Fla. : |b CRC press, |c 2002. | ||
| 300 | |a 723 p. : |b il., tabla, diagr. | ||
| 500 | |a Apéndices: p.669-702 | ||
| 500 | |a Ejercicios y bibliografía al final de cada capítulo | ||
| 580 | |a Ed. anterior: Fundamentals of microfabrication and nanotechnology. 3.ed.. Inventario: 50895 | ||
| 650 | 4 | |a SEMICONDUCTORES -DISPOSITIVOS | |
| 650 | 4 | |a MICROELECTROMECANICA | |
| 650 | 4 | |a MICROELECTRONICA | |
| 650 | 4 | |a MICROFABRICACION | |
| 650 | 4 | |a NANOTECNOLOGIA | |
| 999 | |c 25509 |d 25509 | ||
| 952 | |0 0 |1 4 |2 udc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2018-02-20 |i 50590 |l 2 |m 1 |o 621.382.2 M266 2.ed. |p 50590 |r 2025-05-29 10:11:00 |s 2025-05-28 |w 2018-02-20 |y BK | ||