DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS.
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| Main Author: | |
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| Corporate Author: | |
| Other Authors: | , , |
| Format: | Book |
| Language: | German |
| Published: |
Karlsruhe :
Kernforschungszentrum Karlsruhe,
1993.
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| 100 | 1 | |a Kadel, K. | |
| 710 | 2 | |a Kernforschungszentrum Karlsruhe | |
| 245 | 1 | 0 | |a DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. |
| 260 | |a Karlsruhe : |b Kernforschungszentrum Karlsruhe, |c 1993. | ||
| 300 | |a 94 p. | ||
| 700 | 1 | |a Stern, G. | |
| 700 | 1 | |a Broßardt, R. | |
| 700 | 1 | |a Schomburg, W. | |
| 999 | |c 17478 |d 17478 | ||