Kadel, K., Stern, G., Broßardt, R., & Schomburg, W. (1993). DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. Kernforschungszentrum Karlsruhe.
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Chicago Style (17th ed.) Citation
Kadel, K., G. Stern, R. Broßardt, and W. Schomburg. DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. Karlsruhe: Kernforschungszentrum Karlsruhe, 1993.
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MLA (9th ed.) Citation
Kadel, K., et al. DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. Kernforschungszentrum Karlsruhe, 1993.
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Warning: These citations may not always be 100% accurate.