DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS.
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| Main Author: | |
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| Corporate Author: | |
| Other Authors: | , , |
| Format: | Book |
| Language: | German |
| Published: |
Karlsruhe :
Kernforschungszentrum Karlsruhe,
1993.
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| Physical Description: | 94 p. |
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| ISSN: | 0303-4003 |