Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures
Fil: Salazar Alarcón, L. Comisión Nacional de Energía Atómica. Instituto de Nanociencia y Nanotecnología. Laboratorio de Bajas Temperaturas; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina
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| Main Authors: | , , , |
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| Language: | English |
| Published: |
Hindawi
2016
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| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/5392 |
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| _version_ | 1875043444915699712 |
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| author | Salazar Alarcón, L. Martínez,E. D. Rodríguez, L. M. Pastoriza, H. |
| author2 | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas |
| author_browse | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas Martínez,E. D. Pastoriza, H. Rodríguez, L. M. Salazar Alarcón, L. |
| author_facet | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas Salazar Alarcón, L. Martínez,E. D. Rodríguez, L. M. Pastoriza, H. |
| author_sort | Salazar Alarcón, L. |
| collection | DSpace |
| description | Fil: Salazar Alarcón, L. Comisión Nacional de Energía Atómica. Instituto de Nanociencia y Nanotecnología. Laboratorio de Bajas Temperaturas; Argentina; Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina |
| id | dspace-20.500.12553-5392 |
| institution | Repositorio Institucional NUCLEA |
| language | eng |
| publishDate | 2016 |
| publishDateSort | 2016 |
| publisher | Hindawi |
| publisherStr | Hindawi |
| record_format | dspace |
| spellingShingle | RETRACCION MEMS ESPECTROSCOPIA DE RETRODIFUSION RUTHERFORD Shrinkage MEMS Rutherford backscattering spectroscopy Salazar Alarcón, L. Martínez,E. D. Rodríguez, L. M. Pastoriza, H. Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures |
| thumbnail | https://nuclea.cnea.gob.ar/server/api/core/bitstreams/e1bb4636-e47f-4689-a6c8-c1ad4f733f50/content |
| title | Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures |
| title_full | Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures |
| title_fullStr | Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures |
| title_full_unstemmed | Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures |
| title_short | Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures |
| title_sort | topographical and physicochemical contrast in photopatterned su 8 films for microfabrication of multilayer structures |
| topic | RETRACCION MEMS ESPECTROSCOPIA DE RETRODIFUSION RUTHERFORD Shrinkage MEMS Rutherford backscattering spectroscopy |
| url | https://nuclea.cnea.gob.ar/handle/20.500.12553/5392 |
| work_keys_str_mv | AT salazaralarconl topographicalandphysicochemicalcontrastinphotopatternedsu8filmsformicrofabricationofmultilayerstructures AT martinezed topographicalandphysicochemicalcontrastinphotopatternedsu8filmsformicrofabricationofmultilayerstructures AT rodriguezlm topographicalandphysicochemicalcontrastinphotopatternedsu8filmsformicrofabricationofmultilayerstructures AT pastorizah topographicalandphysicochemicalcontrastinphotopatternedsu8filmsformicrofabricationofmultilayerstructures |