Building a Fab on a Chip

Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro; Argentina

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Bibliographic Details
Main Authors:	Imboden, M., Han, H., Stark, T., Lowell, E., Chang, J., Pardo, F., Bolle, C., del Corro, P.G., Bishop, D.J.
Other Authors:	Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas
Language:	English
Published:	Royal Society of Chemistry 2014
Subjects:	SILICIO MEMS Silicon Nanometer scale
Online Access:	https://nuclea.cnea.gob.ar/handle/20.500.12553/5280
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