Building a Fab on a Chip
Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro; Argentina
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| Main Authors: | , , , , , , , , |
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| Language: | English |
| Published: |
Royal Society of Chemistry
2014
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| Online Access: | https://nuclea.cnea.gob.ar/handle/20.500.12553/5280 |
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| _version_ | 1866906954619682816 |
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| author | Imboden, M. Han, H. Stark, T. Lowell, E. Chang, J. Pardo, F. Bolle, C. del Corro, P.G. Bishop, D.J. |
| author2 | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas |
| author_browse | Bishop, D.J. Bolle, C. Chang, J. Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas Han, H. Imboden, M. Lowell, E. Pardo, F. Stark, T. del Corro, P.G. |
| author_facet | Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas Imboden, M. Han, H. Stark, T. Lowell, E. Chang, J. Pardo, F. Bolle, C. del Corro, P.G. Bishop, D.J. |
| author_sort | Imboden, M. |
| collection | DSpace |
| description | Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro; Argentina |
| id | dspace-20.500.12553-5280 |
| institution | Repositorio Institucional NUCLEA |
| language | eng |
| publishDate | 2014 |
| publishDateSort | 2014 |
| publisher | Royal Society of Chemistry |
| publisherStr | Royal Society of Chemistry |
| record_format | dspace |
| spelling | dspace-20.500.12553-52802024-05-09T05:33:17Z Building a Fab on a Chip Imboden, M. Han, H. Stark, T. Lowell, E. Chang, J. Pardo, F. Bolle, C. del Corro, P.G. Bishop, D.J. SILICIO MEMS Silicon Nanometer scale MEMS Fil: del Corro, P.G. Comisión Nacional de Energía Atómica. Instituto Balseiro; Argentina Fil: Imboden, M. Boston University; Estados Unidos Fil: Han, H. Boston University; Estados Unidos Fil: Stark, T. Boston University; Estados Unidos Fil: Lowell, E. Boston University; Estados Unidos Fil: Chang, J. Boston University; Estados Unidos Fil: Pardo, F. Bell Labs. Alcatel-Lucen; Estados Unidos Fil: Bolle, C. Labs. Alcatel-Lucen; Estados Unidos Fil: Bishop, D.J. Boston University; Estados Unidos Royal Society of Chemistry Gerencia Física. Departamento Materia Condensada. División Bajas Temperaturas 2014-00-00 info:eu-repo/semantics/openAccess application/pdf https://nuclea.cnea.gob.ar/handle/20.500.12553/5280 2040-3372 eng n. 6 Nanoscale info:eu-repo/semantics/openAccess |
| spellingShingle | SILICIO MEMS Silicon Nanometer scale MEMS Imboden, M. Han, H. Stark, T. Lowell, E. Chang, J. Pardo, F. Bolle, C. del Corro, P.G. Bishop, D.J. Building a Fab on a Chip |
| title | Building a Fab on a Chip |
| title_full | Building a Fab on a Chip |
| title_fullStr | Building a Fab on a Chip |
| title_full_unstemmed | Building a Fab on a Chip |
| title_short | Building a Fab on a Chip |
| title_sort | building a fab on a chip |
| topic | SILICIO MEMS Silicon Nanometer scale MEMS |
| url | https://nuclea.cnea.gob.ar/handle/20.500.12553/5280 |
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