Solidstate physics, fluidics, and analytical techniques in micro and nanotechnology
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton; London; New York :
CRC press Taylor and Francis Group,
2012.
|
| Subjects: | |
| Tags: |
No Tags, Be the first to tag this record!
|
MARC
| LEADER | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 008 | 170703s2012####nyuad||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | |a 9781420055115 | ||
| 041 | 7 | |a en |2 ISO 639-1 | |
| 091 | |a 50895 | ||
| 092 | |a v.1 [xiii, 641 p.] | ||
| 100 | 1 | |a Madou, Marc J. | |
| 245 | 1 | 0 | |a Solidstate physics, fluidics, and analytical techniques in micro and nanotechnology |
| 773 | 1 | |a Fundamentals of microfabrication and nanotechnology | |
| 260 | |a Boca Raton; London; New York : |b CRC press Taylor and Francis Group, |c 2012. | ||
| 300 | |a 3 v. : |b il., tabla, diagr. | ||
| 500 | |a Título de la 1.ed.: 'Fundamentals of microfabrication' | ||
| 500 | |a Título de la 2.ed.: 'Fundamentals of microfabrication : the science of miniaturization' | ||
| 500 | |a Ejercicios y bibliografía al final de cada capítulo | ||
| 580 | |a Ed. anterior: Fundamentals of microfabrication : the science of miniaturization. 2.ed.. Inventario: 50590 | ||
| 650 | 4 | |a SEMICONDUCTORES -DISPOSITIVOS | |
| 650 | 4 | |a MICROELECTROMECANICA | |
| 650 | 4 | |a MICROELECTRONICA | |
| 650 | 4 | |a MICROFABRICACION | |
| 650 | 4 | |a NANOTECNOLOGIA | |
| 999 | |c 25858 |d 25858 | ||
| 952 | |0 0 |1 4 |2 udc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2018-02-20 |i 50895 |l 2 |m 1 |o 621.382.2 M266 3.ed. v.1 |p 50895 |r 2025-05-29 10:11:00 |s 2025-05-28 |t v.1 [xiii, 641 p.] |w 2018-02-20 |y BK | ||
| 952 | |0 0 |1 4 |2 udc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2018-02-20 |i 50896 |l 2 |m 1 |o 621.382.2 M266 3.ed. v.1 |p 50896 |r 2025-05-29 10:11:00 |s 2025-05-28 |t v.3 |w 2018-02-20 |y BK | ||