Solidstate physics, fluidics, and analytical techniques in micro and nanotechnology
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton; London; New York :
CRC press Taylor and Francis Group,
2012.
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| Subjects: | |
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| Item Description: | Título de la 1.ed.: 'Fundamentals of microfabrication' Título de la 2.ed.: 'Fundamentals of microfabrication : the science of miniaturization' Ejercicios y bibliografía al final de cada capítulo |
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| Physical Description: | 3 v. : il., tabla, diagr. |
| ISBN: | 9781420055115 |
| Related Items: | Ed. anterior: Fundamentals of microfabrication : the science of miniaturization. 2.ed.. Inventario: 50590 |