Principles of plasma discharges and materials processing.
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York :
John Wiley,
1994.
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| Subjects: | |
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| 003 | AR-SmCIES | ||
| 020 | |a 0471005770 | ||
| 041 | 7 | |a en |2 ISO 639-1 | |
| 091 | |a 31 4 5 207 ITJS | ||
| 100 | 1 | |a Lieberman, Michael A. | |
| 245 | 1 | 0 | |a Principles of plasma discharges and materials processing. |
| 260 | |a New York : |b John Wiley, |c 1994. | ||
| 300 | |a xxvi, 572 p. : |b diagr. | ||
| 500 | |a Apéndices y bibliografía: p.541-564 | ||
| 650 | 4 | |a PLASMA, FISICA DEL | |
| 650 | 4 | |a PELICULAS DELGADAS [FISICA] | |
| 650 | 4 | |a ESTADO SOLIDO DEFECTOS | |
| 700 | 1 | |a Lichtenberg, Allan J. | |
| 999 | |c 23279 |d 23279 | ||