Principles of plasma discharges and materials processing.

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Bibliographic Details
Main Author: Lieberman, Michael A.
Other Authors: Lichtenberg, Allan J.
Format: Book
Language:English
Published: New York : John Wiley, 1994.
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Description
Item Description:Apéndices y bibliografía: p.541-564
Physical Description:xxvi, 572 p. : diagr.
ISBN:0471005770