Handbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications.
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Westwood, N.J. :
Noyes publ.,
1988.
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| Series: | Materials science and process technology series
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| Subjects: | |
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| Item Description: | Bibliografía al final de cada capítulo |
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| Physical Description: | xvii, 413 p. : il. |
| ISBN: | 0815511531 |