Handbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications.
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Westwood, N.J. :
Noyes publ.,
1988.
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| Series: | Materials science and process technology series
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| Subjects: | |
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MARC
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| 003 | AR-SmCIES | ||
| 020 | |a 0815511531 | ||
| 041 | 7 | |a en |2 ISO 639-1 | |
| 091 | |a 31 4 5 163 ITJS | ||
| 100 | 1 | |a Schuegraf, Klaus K. |e ed. | |
| 245 | 1 | 0 | |a Handbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications. |
| 260 | |a Westwood, N.J. : |b Noyes publ., |c 1988. | ||
| 300 | |a xvii, 413 p. : |b il. | ||
| 490 | 1 | |a Materials science and process technology series | |
| 500 | |a Bibliografía al final de cada capítulo | ||
| 650 | 4 | |a PELICULAS DELGADAS [FISICA] | |
| 650 | 4 | |a MICROSCOPIA ELECTRONICA | |
| 830 | |a Materials science and process technology series | ||
| 999 | |c 23267 |d 23267 | ||