Handbook of ion beam processing technology : principles, deposition, film modification and synthesis.
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| Main Author: | |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J. :
Noyes publ.,
1989.
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| Series: | Materials science and process technology series
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| Subjects: | |
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| 008 | 170703s1989####xxuad||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 041 | 7 | |a en |2 ISO 639-1 | |
| 091 | |a 1972 PMTM | ||
| 100 | 1 | |a Cuomo, Jerome J. |e ed. | |
| 245 | 1 | 0 | |a Handbook of ion beam processing technology : principles, deposition, film modification and synthesis. |
| 260 | |a Park Ridge, N.J. : |b Noyes publ., |c 1989. | ||
| 300 | |a xviii, 438 p. : |b il., tabla, diagr. | ||
| 490 | 1 | |a Materials science and process technology series | |
| 500 | |a Bibliografía al final de cada capítulo | ||
| 650 | 4 | |a OPTICA IONICA -MANUALES | |
| 650 | 4 | |a BOMBARDEO DE IONES -APLICACIONES [INDUSTRIA] -MANUALES | |
| 650 | 4 | |a IMPLANTACION DE IONES -MANUALES | |
| 700 | 1 | |a Rossnagel, Stephen M. |e ed. | |
| 700 | 1 | |a Kaufman, Harold R. |e ed. | |
| 830 | |a Materials science and process technology series | ||
| 999 | |c 22114 |d 22114 | ||