Handbook of ion beam processing technology : principles, deposition, film modification and synthesis.
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| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J. :
Noyes publ.,
1989.
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| Series: | Materials science and process technology series
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| Subjects: | |
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| Item Description: | Bibliografía al final de cada capítulo |
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| Physical Description: | xviii, 438 p. : il., tabla, diagr. |