Plasma properties, deposition and etching.
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Aedermannsdorf :
Trans Tech Publications,
1993.
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| Subjects: | |
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| Item Description: | Bibliografía al final de cada trabajo Publicación de la revista "Materials science forum" vol.140/142 de 1993 |
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| Physical Description: | x, 742 p. : il. |
| ISBN: | 087849670X |
| ISSN: | 02555476 |