APA (7th ed.) Citation
Pouch, J. J., & Alterovitz, S. A. (1993). Plasma properties, deposition and etching. Trans Tech Publications.
Chicago Style (17th ed.) Citation
Pouch, J. J., and S. A. Alterovitz. Plasma Properties, Deposition and Etching. Aedermannsdorf: Trans Tech Publications, 1993.
MLA (9th ed.) Citation
Pouch, J. J., and S. A. Alterovitz. Plasma Properties, Deposition and Etching. Trans Tech Publications, 1993.
Warning: These citations may not always be 100% accurate.