Intelligents Mikrosystem zur messung von Beschleunigungen basierend auf LIGA-Mikromechanik.
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| Main Author: | |
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| Corporate Author: | |
| Other Authors: | , |
| Format: | Book |
| Language: | German |
| Published: |
Karlsruhe :
FZKA,
1995.
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| Item Description: | BibliografiÃa: p.105-109 |
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| Physical Description: | 119 p. : il. |
| ISSN: | 0947-8620 |