Intelligents Mikrosystem zur messung von Beschleunigungen basierend auf LIGA-Mikromechanik.
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| Main Author: | |
|---|---|
| Corporate Author: | |
| Other Authors: | , |
| Format: | Book |
| Language: | German |
| Published: |
Karlsruhe :
FZKA,
1995.
|
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| 100 | 1 | |a Strohrmann, M. | |
| 710 | 2 | |a Forschungszentrum Karlsruhe^pDE | |
| 245 | 1 | 0 | |a Intelligents Mikrosystem zur messung von Beschleunigungen basierend auf LIGA-Mikromechanik. |
| 260 | |a Karlsruhe : |b FZKA, |c 1995. | ||
| 300 | |a 119 p. : |b il. | ||
| 500 | |a Bibliografiía: p.105-109 | ||
| 700 | 1 | |a Mohr, J. | |
| 700 | 1 | |a Schulz, J. | |
| 999 | |c 18631 |d 18631 | ||