Microminiature fluidic beam elements in LIGA-technique with integrated electrical control.
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| Main Author: | |
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| Corporate Author: | |
| Other Authors: | |
| Format: | Book |
| Language: | German |
| Published: |
Karlsruhe :
Kfk,
1994.
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3rd Floor Main Library
| Call Number: |
A1234.567 |
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| Copy 1 | Available |