Microminiature fluidic beam elements in LIGA-technique with integrated electrical control.
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| Main Author: | |
|---|---|
| Corporate Author: | |
| Other Authors: | |
| Format: | Book |
| Language: | German |
| Published: |
Karlsruhe :
Kfk,
1994.
|
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| 041 | 7 | |a de |2 ISO 639-1 | |
| 041 | 7 | |a en |2 ISO 639-1 | |
| 091 | |a 45161 | ||
| 100 | 1 | |a Vollmer, J. | |
| 710 | 2 | |a Kernforschungszentrum Karlsruhe | |
| 242 | 0 | 1 | |a Miniaturisierte fluidische strahlemente in LIGA-technik mit integrierter elektrischer steuerung. |
| 245 | 1 | 0 | |a Microminiature fluidic beam elements in LIGA-technique with integrated electrical control. |
| 260 | |a Karlsruhe : |b Kfk, |c 1994. | ||
| 300 | |a 89 p. | ||
| 700 | 1 | |a Hein, H. | |
| 999 | |c 18389 |d 18389 | ||