Electron beam interactions with solids for microscopy, microanalysis and microlithography.
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| Corporate Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
AMF O'Hare, Il. :
Scanning electron microscopy,
c1984.
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| 003 | AR-SmCIES | ||
| 020 | |a 0931288304 | ||
| 041 | 7 | |a en |2 ISO 639-1 | |
| 080 | |a 539.2:539.12.04"1982" | ||
| 080 | |a 537.533.35 | ||
| 091 | |a 34309 | ||
| 100 | 1 | |a Kyser, David F. |e ed. | |
| 245 | 1 | 0 | |a Electron beam interactions with solids for microscopy, microanalysis and microlithography. |
| 260 | |a AMF O'Hare, Il. : |b Scanning electron microscopy, |c c1984. | ||
| 300 | |a 372 p. : |b il. ; 28,5 cm. | ||
| 500 | |a Held at the Asilomar conference center | ||
| 500 | |a Bibliografía al final de cada artículo | ||
| 650 | 4 | |a RADIACIONES -EFECTOS EN SOLIDOS -CONGRESOS | |
| 650 | 4 | |a MICROSCOPIA ELECTRONICA | |
| 711 | 2 | |a Conference on electron beam interactions with solids for microscopy, microanalysis and microlithography |n 1. |c Monterey, Calif,US |d 1982 | |
| 711 | 2 | |a Pfefferkorn conference |n 1. |c Monterey, Calif,US |d 1982 | |
| 999 | |c 15022 |d 15022 | ||
| 952 | |0 0 |1 0 |2 udc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2018-02-20 |i 34309 |o 539.2: 539.12.04 C76 1982 |p 34309 |r 2018-02-20 00:00:00 |w 2018-02-20 |y BK | ||