Electron beam interactions with solids for microscopy, microanalysis and microlithography.
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| Main Author: | |
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| Corporate Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
AMF O'Hare, Il. :
Scanning electron microscopy,
c1984.
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| Subjects: | |
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| Item Description: | Held at the Asilomar conference center Bibliografía al final de cada artículo |
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| Physical Description: | 372 p. : il. ; 28,5 cm. |
| ISBN: | 0931288304 |