Journal of vacuum science and technology
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| New Title: | Journal of vacuum science and technology A Journal of vacuum science and technology B |
|---|---|
| Format: | Journal |
| Language: | English |
| Published: |
New York, N.Y. :
AMERICAN INSTITUTE OF PHYSICS,
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| Subjects: | |
| Online Access: | View in OPAC |
| Tags: |
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MARC
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|---|---|---|---|
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| 003 | AR-SmCIES | ||
| 022 | |a 0022-5355 | ||
| 210 | 0 | |a J. VAC. SCI. TECHNOL. | |
| 222 | 0 | |a Journal of vacuum science and technology | |
| 245 | 0 | 0 | |a Journal of vacuum science and technology |
| 260 | |a New York, N.Y. : |b AMERICAN INSTITUTE OF PHYSICS, | ||
| 310 | |a Irregular | ||
| 653 | |a FISICA | ||
| 785 | 1 | 6 | |a Journal of vacuum science and technology A |
| 785 | 1 | 6 | |a Journal of vacuum science and technology B |
| 999 | |c 12456 |d 12456 | ||
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| 952 | |0 0 |1 0 |2 udc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2018-02-20 |h 1982, v. 20, no. (2,3,4) |r 2018-02-20 00:00:00 |w 2018-02-20 |y CR | ||
| 952 | |0 0 |1 0 |2 udc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2018-02-20 |h 1981, v. 19, no. (1,3,4) |r 2018-02-20 00:00:00 |w 2018-02-20 |y CR | ||
| 952 | |0 0 |1 0 |2 udc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2018-02-20 |h 1973-81,10-18 |r 2018-02-20 00:00:00 |w 2018-02-20 |y CR | ||