Journal of vacuum science and technology
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| New Title: | Journal of vacuum science and technology A Journal of vacuum science and technology B |
|---|---|
| Format: | Journal |
| Language: | English |
| Published: |
New York, N.Y. :
AMERICAN INSTITUTE OF PHYSICS,
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| Subjects: | |
| Tags: |
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MARC
| LEADER | 00000nas a2200000 a 4500 | ||
|---|---|---|---|
| 008 | 170703d19731982nyuux|p#r||||#00|#||eng#d | ||
| 003 | AR-SmCIES | ||
| 022 | |a 0022-5355 | ||
| 210 | 0 | |a J. VAC. SCI. TECHNOL. | |
| 222 | 0 | |a Journal of vacuum science and technology | |
| 245 | 0 | 0 | |a Journal of vacuum science and technology |
| 260 | |a New York, N.Y. : |b AMERICAN INSTITUTE OF PHYSICS, | ||
| 310 | |a Irregular | ||
| 653 | |a FISICA | ||
| 785 | 1 | 6 | |a Journal of vacuum science and technology A |
| 785 | 1 | 6 | |a Journal of vacuum science and technology B |
| 999 | |c 12456 |d 12456 | ||