Ion beam deposition of diamond-like carbon films

Fil: Huck, Hugo Alberto. Comisión Nacional de Energía Atómica; Argentina.

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Bibliographic Details
Main Authors:	Huck, Hugo Alberto, Jech, Alberto Estanislao, Righini, Raúl, Halac, Emilia Beatriz, Rodríguez de Benyacar, María Angélica, Nicolai, Julio Antonio
Language:	English
Published:	1996
Online Access:	https://nuclea.cnea.gob.ar/handle/20.500.12553/2747 https://worldwide.espacenet.com/patent/search/family/003478833/publication/US5547714A?q=pn%3DUS5547714A https://patents.google.com/patent/US5547714A/en
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