Basic vacuum technology.
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| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bristol and Philadelphia :
Institute of Physics publ.,
1998.
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| Subjects: | |
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| Item Description: | Apéndices: p.160-177 Bibliografía: p.178-179 y al final de cada capítulo |
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| Physical Description: | xiv, 189 p. : tabla, diagr. |
| ISBN: | 0750304952 |