Handbook of ion implantation technology.

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Bibliographic Details
Main Author:	Ziegler, J. F. (ed.)
Format:	Book
Published:	Amsterdam : Elsevier Science Publishers, 1992.
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091			\|a 1864 PMTM
100	1		\|a Ziegler, J. F. \|e ed.
245	1	0	\|a Handbook of ion implantation technology.
260			\|a Amsterdam : \|b Elsevier Science Publishers, \|c 1992.
300			\|a 700 p.
999			\|c 21166 \|d 21166
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