Wissensbasierte Ansätze zur Optimierung und Steuerung von Plasmadepositionsexperimenten.

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Bibliographic Details
Main Author: Emmelmann, K.
Corporate Author: Hahn-Meitner-Institut Berlin Gmb^pDE
Other Authors: Mädler, F. (Dr.), Risius, J., Schirmacher, P., Seidelmann, G.
Format: Book
Language:German
Published: Berlin : HMI, 1995.
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3rd Floor Main Library

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Call Number: A1234.567
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