Microelectronic engineering
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| Format: | Journal |
|---|---|
| Online Access: | http://www.sciencedirect.com/science/journal/01679317 |
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MARC
| LEADER | 00000nas a2200000 a 4500 | ||
|---|---|---|---|
| 008 | 180201d19831994 u||pss||||#00|#||uuu#d | ||
| 003 | AR-SmCIES | ||
| 022 | |a 0167-9317 | ||
| 222 | 0 | |a Microelectronic engineering | |
| 245 | 0 | 0 | |a Microelectronic engineering |
| 856 | |u http://www.sciencedirect.com/science/journal/01679317 | ||
| 999 | |c 14433 |d 14433 | ||
| 952 | |0 0 |1 0 |2 udc |4 0 |7 0 |a CIES-CAC |b CIES-CAC |d 2018-02-20 |h 1983-2011, v1-88 |r 2018-02-20 00:00:00 |w 2018-02-20 |y CR | ||