Journal of vacuum science and technology B
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| Previous Title: | Journal of vacuum science and technology |
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| Format: | Journal |
| Language: | English |
| Published: |
New York, N.Y. :
American Vacuum SocietyAmerican Institute of Physics,
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| Subjects: | |
| Online Access: | View in OPAC |
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| Publication Frequency: | Bimestral |
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| ISSN: | 0734-211X |