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Sathisivan, Mogana
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Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography
by
Perez, Diego Javier
,
Wang, Mingkang
,
Madhaven, Venkatesh
,
Sathisivan, Mogana
,
Tay, Charlie
,
Aksyuk, Vladimir A.
Published 2023
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